| Customization: | Available |
|---|---|
| Warranty: | One Year |
| Type: | Coating Production Line |
This system features 1-inch or 2-inch magnetron targets, allowing selection based on substrate size. The three-target configuration is ideal for multi-layer coatings. It includes two-channel high-precision mass flowmeters (customizable up to four channels) and advanced turbomolecular pump sets achieving a vacuum of up to 1.0E-5Pa.
Multiple solenoid valves control the gas path, allowing chamber access without shutting down the pump, significantly improving workflow efficiency. An integrated industrial computer can be equipped to automate vacuum and sputtering power control.
Ideal for laboratory preparation of various films:
| Component | Specification | Component | Specification | |
|---|---|---|---|---|
| Sample Stage | Size | φ185mm | Temp. Accuracy | ±1ºC |
| Heating Temp | Max 500ºC | Rotate Speed | 1-20rpm adjustable | |
| Target Head | Quantity | 2" × 3 (1",2" optional) | Water Chiller | 10L/min flow rate |
| Cooling Mode | Water cooling | - | - | |
| Vacuum Chamber | Chamber Size | φ300mm × 300mm | Watch Window | φ100mm |
| Material | Stainless steel | Opening Mode | Top cover open | |
| Flowmeter | Channels | 2 channels; range 100sccm (customizable) | ||
| Vacuum System | Ultimate Vacuum | 1.0E-5Pa | Pumping Rate | 600L/S (Molecular pump) |
| Time to 1.0E-3Pa | Within 20 minutes | |||
| Power Configuration | Quantity | RF power supply × 3 | Max Output | RF 300 W |
| Dimensions | Size | 600 × 650 × 1280mm | Total Weight | 300kg |
With a mature technology research and development team consisting of 33 technicians and a dedicated production facility of about 1,500 square meters, we specialize in laboratory technology research equipment. Our products serve scientific research in labs of universities and colleges globally, with exports to 25 countries including the United States and Europe.
XOVEC Orthopedic Implants