Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems
Three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable. Equipped with three 300W RF power supplies, it meets the needs of multi-layer or multiple coatings.
📊 Basic Information
Model NO.
CY-MSP300S-3RF
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Sample Stage
Dia. 185mm
Heating Temp.
Max 500℃
Rotate Speed
1-20rpm Adjustable
Chamber
Stainless Steel
Capacity
100 pieces/Month
⚙️ Magnetron Sputtering Coater Introduction

This system features 1-inch or 2-inch magnetron targets, allowing selection based on substrate size. The three-target configuration is ideal for multi-layer coatings. It includes two-channel high-precision mass flowmeters (customizable up to four channels) and advanced turbomolecular pump sets achieving a vacuum of up to 1.0E-5Pa.

Multiple solenoid valves control the gas path, allowing chamber access without shutting down the pump, significantly improving workflow efficiency. An integrated industrial computer can be equipped to automate vacuum and sputtering power control.

🚀 Technical Applications

Ideal for laboratory preparation of various films:

  • Ferroelectric thin films
  • Conductive & Alloy films
  • Semiconductor films
  • Ceramic & Dielectric films
  • Optical & Oxide films
  • Hard films & PTFE films
📝 Technical Parameters
Component Specification Component Specification
Sample Stage Size φ185mm Temp. Accuracy ±1ºC
Heating Temp Max 500ºC Rotate Speed 1-20rpm adjustable
Target Head Quantity 2" × 3 (1",2" optional) Water Chiller 10L/min flow rate
Cooling Mode Water cooling - -
Vacuum Chamber Chamber Size φ300mm × 300mm Watch Window φ100mm
Material Stainless steel Opening Mode Top cover open
Flowmeter Channels 2 channels; range 100sccm (customizable)
Vacuum System Ultimate Vacuum 1.0E-5Pa Pumping Rate 600L/S (Molecular pump)
Time to 1.0E-3Pa Within 20 minutes
Power Configuration Quantity RF power supply × 3 Max Output RF 300 W
Dimensions Size 600 × 650 × 1280mm Total Weight 300kg
📸 Detailed Photos
🏭 Manufacturing Excellence

With a mature technology research and development team consisting of 33 technicians and a dedicated production facility of about 1,500 square meters, we specialize in laboratory technology research equipment. Our products serve scientific research in labs of universities and colleges globally, with exports to 25 countries including the United States and Europe.

❓ Frequently Asked Questions
Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high quality and optimal pricing through mature technical experience.
How does your after-sales service system work?
The product warranty period is 12 months, and we provide lifetime maintenance. Our departments respond within 24 hours to resolve any technical issues.
What is the delivery time for standard and customized instruments?
In-stock goods take 5-10 days. For customized instruments, it usually takes 30-60 days depending on the specific requirements and specifications.
How do you handle different power supplies and plugs internationally?
We supply transformers and plugs compliant with your local requirements and the specific power standards of your country.
What are the available payment and delivery methods?
We accept T/T, L/C, and D/P. For delivery, we offer express, air, and sea shipping using standard export fumigation wooden box packaging.

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