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CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
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CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating

CVD Ald Atomic Layer Deposition System for Powder Coating Plating

Customization: Available
After-sales Service: Onlin
Warranty: 1
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Product Description

📋

Basic Information

Model NO.
CY-ALD
Type
Coating Production Line
Coating
Vacuum Coating
Certification
CE
Condition
New
Wafer Dimension
8 Inch and Below
Wafer Temperature
Rt-400c, Precision +-0.1c
ALD Valve
Swagelok Ald Swift Valve
Background Vacuum
<5*10-3torr
Gas Carrier System
N2 or Ar
🔬

Product Introduction

CVD ALD Atomic Layer Deposition System for Powder Coating Plating

The Thermal Atomic Layer Deposition System is a single-wafer deposition system specially designed for scientific research and small-scale industrial experiments. Fully compliant with CE criteria, it is widely utilized in micro-electronics, nano-materials, optical films, and solar battery technology.

⭐ Key Product Benefits:

Advanced software controlling system: Integrated functions including technological formulation, parameter setting, popedom setting, interlocking alarming, and state supervisory control.

⚙️

ALD Films & Applications

Supported ALD Films:

  • Elementary substance: Co, Cu, Ta, Ti, W, Ge, Pt, Ru, Ni, Fe
  • Nitride: TiN, SiN, AlN, TaN, ZrN, HfN, WN
  • Oxide: TiO2, HfO2, SiO2, ZnO, ZrO2, Al2O3, La2O3, SnO2
  • Others: GaAs, AlP, InP, GaP, InAs, LaHfxOy, SrTiO3, SrTaO6

Application Fields:

  • High-k gate oxides & Storage capacitor dielectrics
  • High aspect ratio diffusion barriers for Cu interconnects
  • Pinhole-free passivation layers for OLEDs and polymers
  • Highly conformal coatings for MEMS & Nanoporous structures
  • Solar battery & Flat plate display technology
  • Optical thin-film & Special fiber doping
📊

Technical Parameters

Wafer Dimension8 inch and below
Wafer TemperatureRT-400ºC, Precision ±0.1ºC
Number of PrecursorThree precursor lines (Optional more)
Precursor Line TempRT-200ºC, Precision ±0.1ºC
Source Bottle TempRT-200ºC, Precision ±0.1ºC
ALD ValveSwagelok ALD swift valve
Background Vacuum<5*10-3 Torr
Gas Carrier SystemN2 or Ar
Growing ModeConsecutive or interval deposition mode
Controlling SystemPLC plus touch screen or display
Power Supply50-60Hz, 220V/20A AC
Deposition HeterogeneityHeterogeneity <±1%
Instrument Dimension600mm x 600mm x 1100mm
🖼️

Detailed Photos

ALD System 1
ALD System 2
ALD System 3
ALD System 4
ALD System 5
ALD System 6
Process Diagram Technical Layout System Component Certification Line
❓

Frequently Asked Questions

Are you a professional manufacturer?
Yes, we are professional laboratory instrument manufacturers with our own design team and factory, ensuring high quality and optimal pricing through mature technical experience.
What is the after-sales service policy?
We provide a 12-month warranty period and lifetime maintenance. Our technical departments respond within 24 hours to resolve any technical issues.
How long is the typical delivery time?
For in-stock goods, delivery takes 5-10 days. Customized instruments typically require 30-60 days depending on specific requirements.
Can you accommodate different regional power supplies?
Yes, we can supply transformers and plugs that match your local requirements and national power standards.
How are the goods packaged for international shipping?
We use standard export fumigation wooden box packaging. Delivery can be arranged via express, air, or sea shipping based on customer preference.
What payment methods are supported?
We support multiple payment methods including T/T, L/C, and D/P. Trade Guarantee usage is recommended for secure transactions.

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